Researcher: J. Leon Shohet

Areas of Research Expertise
  • Applied physics
  • Computing
  • Information
  • Power
  • Plasmas (ionized gases)
  • Tissue engineering and biocompatibility
  • Fusion plasma to make miniature star as a source of energy
  • Fields to produce a doughnut-shaped (toroidal) "magnetic bottle"
  • Containment of the plasma
  • Biotechnology
  • Biocompatible surfaces and directed differentiation of stem cells
  • Effects of vacuum ultraviolet radiation on the processing of electronic materials
  • Nonlinear science
  • Controlled fusion
  • Plasma-aided manufacturing
Web Site Leon Shohet's Department of Electrical and Computer Engineering Website
Curriculum Vitae (CV)
Current/Active Funding
Issued Patent(s)
  • 7,116,115 - Micromachined probe apparatus and methods for making and using same to characterize liquid in a fluidic channel and map embedded charge in a sample on a substrate, issued October 2006.
USPTO Published Applications
Recent Publication(s)
  • Nonthermal combined ultraviolet and vacuum-ultraviolet curing process for organosilicate dielectrics. Zheng H, Guo X, Pei D, Shohet JL. Applied Physics Letters. 2016 Jun;108(24):242906. doi: 10.1063/1.4954176.

  • Effects of Cesium ion-implantation on mechanical and electrical properties of organosilicate low-k films. Li W, Pei D, Guo X, Shohet JL. Applied Physics Letters. 2016 May;108(20):202901. doi: 10.1063/1.4950717.

  • Measurements of Schottky barrier at the low-k SiOC: H/Cu interface using vacuum ultraviolet photoemission spectroscopy. Guo X, Pei D, Zheng H, Shohet JL. Applied Physics Letters. 2015 Dec;107(23):232905. doi: 10.1063/1.4937582.

  • Fluorophore-based sensor for oxygen radicals in processing plasmas. Choudhury F, Sabat G, Sussman MR, Shohet JL. Journal of Vacuum Science & Technology A Vacuum Surfaces and Films. 2015 Oct;33(6). doi: 10.1116/1.4930315.
Recent Artistic Works
  • Center for Plasma-Aided Manufacturing
  • HSX Plasma Laboratory
  • Intra-University Collaboration: Materials Science Program, Animal Sciences
  • Wisconsin Plasma Processing and Technology
  • Research Consortium
  • Colibrys, Inc., Larry L. Chu
  • UW-Milwaukee, Biological Sciences
Research Tools
Research Facilities
E-mail Address [email protected]
Phone Number 608-262-1191
Current University UW–Madison
Department Electrical and Computer Engineering
Title Professor
Other Appointments
Address Line 1 1441 Engineering Hall
Address Line 2 1415 Engineering Drive
City Madison
State WI
Zip Code 53706
Bachelor's Degree
Master's Degree
PhD Ph.D., Carnegie Mellon University, 1961
Other Degrees
Technologies Available for Licensing