Wisconsin Discovery Portal

Researcher's Profile

Last Name


First Name


Middle Initial

Areas of Research Expertise

* Nanoscale properties of surfaces, interfaces, thin films, and dimensionally confined structures
* Atom-scale mechanisms of film growth: Group IV semiconductors, metals for magnetic data storage, carbon nanotubes
* Relationship of nano-morphology to localized electronic, optoelectronic, and magnetic properties: quantum dots, spin valves
* Development of advanced instrumentation for growth and surface and interface studies, in particular diffraction, imaging, and scanned-probe microscopies
* Bioarrays, biomolecular surface modification
* Bioarray fabrication and detection methods

Web site

Max Lagally's University Web Page 

Curriculum Vitae (CV)


Current/Active Funding

  • DOE, 2003-2013, Quantum Dots on a Silicon-On-Insulator (QD/SOI): Nanoscale Strain and Band Structure Engineering
  • NSF, 2009-2012, SiGe Membrane Base Quantum Cascade Lasers
  • Wisconsin Alumni Research Foundation, 2001-2028

Issued Patent(s)

  • 7,901,744 - RF plasma-enhanced deposition of fluorinated films, granted Mar 2011.
  • 7,888,583 - Semiconductor nanowire thermoelectric materials and devices, and processes for producing same, granted Feb 2011.
  • 7,858,876 - Graphite-based photovoltaic cells, granted Dec 2010.
  • 7,812,353 - Front and backside processed thin film electronic devices, granted Oct 2010.
  • 7,777,290 - PIN diodes for photodetection and high-speed, high-resolution image sensing, granted Aug 2010.

USPTO Published Applications

  • 20100308429 - Flexible lateral pin diodes and three-dimensional arrays and imaging devices made therof, Dec 2010.
  • 20100021654 - Plasma-enhanced functionalization of inorganic oxide surfaces, Jan 2010.

Recent Publication(s)

  • "Electron Tunneling Induced Periodic Nucleation and Growth of Nanoparticles: Physical Basis of Chemical Reduction"

Chen F, You HJ, Yang SC, et al., Crystal Growth & Design 11(9): 3707-3712 Sep 2011. We have developed a periodic nucleation and growth mechanism for nanopartide-aggregated structure based on electron tunneling process that occurs in chemical replacement reactions.

  • "Synthesis, assembly and applications of semiconductor nanomembranes"

Rogers JA, Lagally MG, Nuzzo RG, Nature 477(7362) 45-53 Sep 2011. Research in electronic nanomaterials, historically dominated by studies of nanocrystals/fullerenes and nanowires/nanotubes, now incorporates a growing focus on sheets with nanoscale thicknesses, referred to as nanomembranes.

  • "Symmetry in Strain Engineering of Nanomembranes: Making New Strained Materials"

Scott SA, Savage DE, Celler GK, ACS Nano 5(7): 5532-5542 Jul 2011. We show that we can controllably tune the amount of strain and the asymmetry of the strain distribution In elastically isotropic and anisotropic materials uniformly over large areas.

  • "Defect-Free Single-Crystal SiGe: A New Material from Nanomembrane Strain Engineering"

Tanto B, Savage DE, Lagally MG, ACS Nano 5(7): 5814-5822 Jul 2011. Using nanomembrane strain engineering methods, we demonstrate the fabrication of fully elastically relaxed Si(1-x)Ge(x) nanomembranes (NMs) for use as growth substrates for new materials.

Recent Artistic Works



  • Tohoku University, Miyagi, Japan
  • Soitec, USA, Peabody, MA
  • Rutgers State University

Research Tools

  • RHEED, Reflection High-Energy Electron Diffraction and RHEELS, Reflection High-Energy Electron Loss Spectroscopy
  • LEEM, Low Energy Electron Microscope
  • RDS, Reflectance Difference Spectroscopy

Research Facilities


E-mail Address


Phone Number

(608) 263-2078 

Current University

UW - Madison 


Materials Science and Engineering 



Other Appointments


Address Line 1

1109 Engineering Research Building 

Address Line 2

1500 Engineering Drive 





Zip Code


Bachelor's Degree

BS, Pennsylvania State University, Physics, 1963

Master's Degree

MS, University of Wisconsin-Madison, Physics, 1965


PhD, University of Wisconsin-Madison, Physics, 1968

Other Degrees


Technologies Available for Licensing

Created at 10/16/2007 8:13 AM  by Mindy Dawson 
Last modified at 1/16/2014 2:50 PM  by EXTWEB\cwashburn