* Cryogenic refrigeration systems including mixed gas JT systems, reverse-Brayton systems , pulse-tubes, and hybrid cryocoolers* Thermal-fluid problems in semiconductor manufacturing including immersion lithography, EUV lithography, and nanoimprint* Vortex tube theory and application* Refrigeration technology* Gas bearing supported turbomachinery
Zhu WB, Park JM, White MJ et al., Journal of Vacuum Science & Technology A 29 (2): Mar-Apr 2011. This article reports the evaluation of a Joule-Thomson (JT) cooling system that combines two custom micromachined components-a Si/glass-stack recuperative heat exchanger and a piezoelectrically actuated expansion microvalve.
White MJ, Nellis GF, Klein SA, et al., Journal of Heat Transfer 132 (11): 111801 Nov 2010. This paper presents a numerical model of a perforated plate heat exchanger that accounts for axial conduction, external parasitic heat loads, variable fluid and material properties, and conduction to and from the ends of the heat exchanger.
Zhu WB, White MJ, Nellis GF, et al., Journal of Microelectromechanical Systems 19 (1): 38-47 Feb 2010. This paper reports on amicromachined Si/glass stack recuperative heat exchanger with in situ temperature sensors.
Park JM, Evans AT, Rasmussen K, et al., Journal of Microelectromechanical systems 18 (4): 868-877 Aug 2009. This paper reports on design, fabrication, and testing of a piezoelectrically actuated microvalve with integrated sensors for flow modulation at low temperatures. One envisioned application is to control the flow of a cryogen for distributed cooling with a high degree of temperature stability and a small thermal gradient.